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A two‐dimensional waveguide beam for X‐ray nanodiffraction
Author(s) -
Krywka Christina,
Neubauer Henrike,
Priebe Marius,
Salditt Tim,
Keckes Jozef,
Buffet Adeline,
Roth Stephan Volkher,
Doehrmann Ralph,
Mueller Martin
Publication year - 2012
Publication title -
journal of applied crystallography
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.429
H-Index - 162
ISSN - 1600-5767
DOI - 10.1107/s0021889811049132
Subject(s) - beamline , optics , beam (structure) , diffraction , waveguide , materials science , coating , tin , scattering , nanocrystalline material , resolution (logic) , synchrotron , silicon , physics , optoelectronics , nanotechnology , artificial intelligence , computer science , metallurgy
The micro‐ and nanofocus X‐ray scattering (MINAXS) beamline of PETRA III is equipped with two consecutively arranged endstations, the last of which is the nanofocus endstation. The first in‐beam commissioning of the experimental equipment was successfully performed at the end of 2010, using two‐dimensionally confining hard X‐ray silicon waveguides with cross sections of 50 nm × 50 µm to 50 nm × 2 µm for nanobeam generation. A full characterization of the waveguide‐generated beams was performed, giving values for the beam geometries, the transmission efficiencies of the waveguides and absolute fluxes. Along with these results a detailed description of the setup is presented in this paper. A first high‐resolution nanodiffraction experiment on a nanocrystalline TiN hard coating was performed to verify the resolution of the nanodiffraction setup and to reveal the local gradients across the blasted TiN coating. In conclusion, the main concern is the availability of the nanobeam, how it was generated and the fact that a beam out of a two‐dimensionally confining waveguide was used for diffraction experiments for the first time.