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Near‐surface relaxation structure of annealed block copolymer film on Si substrates examined by grazing‐incidence small‐angle scattering utilizing soft X‐rays
Author(s) -
Okuda Hiroshi,
Takeshita Kohki,
Ochiai Shojiro,
Sakurai Shinichi,
Kitajima Yoshinori
Publication year - 2011
Publication title -
journal of applied crystallography
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.429
H-Index - 162
ISSN - 1600-5767
DOI - 10.1107/s0021889811003578
Subject(s) - grazing incidence small angle scattering , materials science , scattering , bragg peak , small angle scattering , optics , small angle x ray scattering , bragg's law , perpendicular , wide angle x ray scattering , elongation , copolymer , penetration depth , molecular physics , small angle neutron scattering , condensed matter physics , composite material , polymer , neutron scattering , diffraction , physics , geometry , beam (structure) , mathematics , ultimate tensile strength
Two‐dimensional grazing‐incidence small‐angle X‐ray scattering (GISAXS) measurements of SEBS8 block copolymer films deposited on Si(001) substrates have been performed to demonstrate depth‐sensitive GISAXS utilizing soft X‐rays of 1.77 keV. Remarkable elongation of the Bragg spots in the q z direction, corresponding to microphase separation, was observed for an angle of incidence close to the critical angle. The elongation was explained in terms of the penetration depth, which limits the effective size in the direction perpendicular to the sample surface. Lattice distortion near the surface was confirmed.