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Depth‐dependent local structures in thin films unraveled by grazing‐incidence X‐ray absorption spectroscopy
Author(s) -
SouzaNeto Narcizo M.,
Ramos Aline Y.,
Tolentino Hélio C. N.,
Martins Alessandro,
Santos Antonio D.
Publication year - 2009
Publication title -
journal of applied crystallography
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.429
H-Index - 162
ISSN - 1600-5767
DOI - 10.1107/s0021889809042678
Subject(s) - spectroscopy , x ray absorption spectroscopy , deconvolution , scattering , thin film , absorption (acoustics) , materials science , absorption spectroscopy , optics , analytical chemistry (journal) , molecular physics , chemistry , nanotechnology , physics , chromatography , quantum mechanics , composite material
A method of using X‐ray absorption spectroscopy together with resolved grazing‐incidence geometry for depth profiling of atomic, electronic or chemical local structures in thin films is presented. The quantitative deconvolution of thickness‐dependent spectral features is performed by fully considering both scattering and absorption formalisms. Surface oxidation and local structural depth profiles in nanometric FePt films are determined, exemplifying the application of the method.