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Scherrer grain‐size analysis adapted to grazing‐incidence scattering with area detectors
Author(s) -
Smilgies DetlefM.
Publication year - 2009
Publication title -
journal of applied crystallography
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.429
H-Index - 162
ISSN - 1600-5767
DOI - 10.1107/s0021889809040126
Subject(s) - scattering , scherrer equation , incidence (geometry) , optics , beamline , physics , detector , grain size , limiting , materials science , diffraction , engineering , beam (structure) , mechanical engineering , metallurgy
Ever since its formulation, the Scherrer formula has been the workhorse for quantifying finite size effects in X‐ray scattering. Various aspects of Scherrer‐type grain‐size analysis are discussed with regard to the characterization of thin films with grazing‐incidence scattering methods utilizing area detectors. After a brief review of the basic features of Scherrer analysis, a description of resolution‐limiting factors in grazing‐incidence scattering geometry is provided. As an application, the CHESS D1 beamline is characterized for typical scattering modes covering length scales from the molecular scale to the nanoscale.

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