Premium
Birefringence images of micropipes viewed end‐on in 6H‐SiC single crystals
Author(s) -
Ning Lina,
Hu Xiaobo,
Xu Xiangang,
Chen Xiufang,
Wang Yingmin,
Jiang Shouzhen,
Li Juan
Publication year - 2008
Publication title -
journal of applied crystallography
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.429
H-Index - 162
ISSN - 1600-5767
DOI - 10.1107/s0021889808024862
Subject(s) - birefringence , silicon carbide , materials science , anisotropy , optics , silicon , crystallography , work (physics) , condensed matter physics , composite material , optoelectronics , chemistry , physics , thermodynamics
The nature of the micropipe, a fatal defect in SiC‐based device applications, is still not fully understood. In this work, the birefringence images of micropipes in 6H‐SiC crystals along the c axis have been observed and simulated in detail. Based on Frank's theory, the intensity contours of birefringence images for micropipes viewed end‐on in 6H‐SiC crystals have been derived by considering the photoelastic anisotropy of silicon carbide. The results are in good agreement with experimental observations.