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Grazing‐incidence small‐angle X‐ray scattering study of porous dielectrics used in advanced microelectronic interconnections
Author(s) -
Simon JeanPaul,
Jousseaume Vincent,
Rolland Guy
Publication year - 2007
Publication title -
journal of applied crystallography
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.429
H-Index - 162
ISSN - 1600-5767
DOI - 10.1107/s0021889806053180
Subject(s) - materials science , dielectric , nanoporous , grazing incidence small angle scattering , amorphous solid , microelectronics , scattering , composite material , porosity , small angle x ray scattering , optoelectronics , optics , nanotechnology , small angle neutron scattering , crystallography , chemistry , neutron scattering , physics
The increase of the integration density and of the operation speed in ultra‐large‐scale integrated microelectronics requires a reduction in the dielectric constant for high‐frequency insulation between the copper connections of some tenth‐of‐micrometre thickness. Recently, the quality of the dielectric has been defined by its dielectric constant k (>1) relative to the unpolarized vacuum ( k = 1). Bulk low k will never reach k lower than 3 and the only way to achieve a further decrease in k is to introduce nanoporous dielectric films compatible with the required mechanical behaviour. We compare the merits and the structure determined by grazing‐incidence small‐angle X‐ray scattering (GISAXS) of four different growth processes: plasma‐enhanced chemical vapour deposition or spin coating with three variants: dual‐phase blend, self‐assembled approach, nanoclustering precursor. All of them are baked in order to cure the amorphous Si w O x C y H z `skeleton' (SiOCH). Depending on the process used, the pore morphologies are very different. They range from well defined pores of 4–5 nm diameter to sub‐nanometric ill‐defined pores which may be described as density fluctuations. Finally, it appears that the curing process is a key problem, which up to now has been difficult to characterize by GISAXS.