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Nanoscale kinetics and dynamics during Ar+ patterning of SiO2
Author(s) -
Mahsa Mokhtarzadeh,
Jeffrey G. Ulbrandt,
Peco Myint,
Suresh Narayanan,
Randall L. Headrick,
Karl Ludwig
Publication year - 2019
Publication title -
physical review. b./physical review. b
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.78
H-Index - 465
eISSN - 2469-9969
pISSN - 2469-9950
DOI - 10.1103/physrevb.99.165429
Subject(s) - physics , scattering , relaxation (psychology) , statistical physics , optics , psychology , social psychology

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