Open AccessProbing the limitations of Sigmund's model of spatially resolved sputtering using Monte Carlo simulations
Author(s) -
G. Hobler,
R. Mark Bradley,
Herbert M. Urbassek
Publication year - 2016
Publication title -
physical review. b./physical review. b
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.78
H-Index - 465
eISSN - 2469-9969
pISSN - 2469-9950
DOI - 10.1103/physrevb.93.205443
Subject(s) - monte carlo method , sputtering , physics , ion , atomic physics , skewness , yield (engineering) , computational physics , materials science , statistics , thin film , mathematics , quantum mechanics , thermodynamics