Open AccessPlasma-graphene interaction and its effects on nanoscale patterning
Author(s) -
Abhilash Harpale,
Marco Panesi,
Huck Beng Chew
Publication year - 2016
Publication title -
physical review. b./physical review. b
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.78
H-Index - 465
eISSN - 2469-9969
pISSN - 2469-9950
DOI - 10.1103/physrevb.93.035416
Subject(s) - graphene , materials science , plasma , basal plane , nanoscopic scale , anisotropy , etching (microfabrication) , fabrication , ion , hydrogen , nanotechnology , chemical physics , condensed matter physics , physics , optics , pathology , medicine , alternative medicine , layer (electronics) , quantum mechanics