Open AccessElectronic structure of the SiNx
Author(s) -
Jörg Patscheider,
Niklas Hellgren,
Richard T. Haasch,
I. Petrov,
J. E. Greene
Publication year - 2011
Publication title -
physical review. b, condensed matter and materials physics
Language(s) - English
Resource type - Journals
eISSN - 1538-4489
pISSN - 1098-0121
DOI - 10.1103/physrevb.83.125124
Subject(s) - materials science , tin , thin film , x ray photoelectron spectroscopy , sputter deposition , overlayer , nanocomposite , sputtering , analytical chemistry (journal) , nanotechnology , chemical engineering , condensed matter physics , metallurgy , physics , chemistry , chromatography , engineering