Open AccessModel for stress and volume changes of a thin film on a substrate upon annealing: Application to amorphous Mo/Si multilayers
Author(s) -
O. B. Loopstra,
E. R. van Snek,
Th. H. de Keijser,
E. J. Mittemeijer
Publication year - 1991
Publication title -
physical review. b, condensed matter
Language(s) - English
Resource type - Journals
eISSN - 1095-3795
pISSN - 0163-1829
DOI - 10.1103/physrevb.44.13519
Subject(s) - amorphous solid , materials science , annealing (glass) , thin film , stress relaxation , condensed matter physics , composite material , crystallography , creep , nanotechnology , chemistry , physics
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