
STEM Imaging with Beam-Induced Hole and Secondary Electron Currents
Author(s) -
William A. Hubbard,
Matthew Mecklenburg,
Ho Leung Chan,
B. C. Regan
Publication year - 2018
Publication title -
physical review applied
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.883
H-Index - 75
eISSN - 2331-7043
pISSN - 2331-7019
DOI - 10.1103/physrevapplied.10.044066
Subject(s) - scanning transmission electron microscopy , secondary electrons , electron beam induced current , electron , cathode ray , materials science , transmission electron microscopy , beam (structure) , optics , electron tomography , resolution (logic) , conventional transmission electron microscope , optoelectronics , physics , scanning electron microscope , computer science , quantum mechanics , artificial intelligence