Open AccessCleanroom strategies for micro- and nano-fabricating flexible implantable neural electronics
Author(s) -
Finlay Walton,
María Cerezo-Sánchez,
Eve McGlynn,
Rupam Das,
Hadi Heidari
Publication year - 2022
Publication title -
philosophical transactions - royal society. mathematical, physical and engineering sciences/philosophical transactions - royal society. mathematical, physical and engineering sciences
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.074
H-Index - 169
eISSN - 1471-2962
pISSN - 1364-503X
DOI - 10.1098/rsta.2021.0009
Subject(s) - nanotechnology , cleanroom , photolithography , electronics , nanolithography , materials science , flexible electronics , fabrication , interfacing , nanometre , biocompatibility , neural prosthesis , computer science , electrical engineering , engineering , biomedical engineering , medicine , alternative medicine , pathology , computer hardware , metallurgy , composite material