Open AccessA statistical method to optimize the chemical etching process of zinc oxide thin films
Author(s) -
David D. Lynes,
Hengky Chandrahalim,
Justin M. Brown,
Kunal Singh,
Kyle T. Bodily,
Kevin Leedy
Publication year - 2022
Publication title -
royal society open science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.84
H-Index - 51
ISSN - 2054-5703
DOI - 10.1098/rsos.211560
Subject(s) - microscale chemistry , materials science , isotropic etching , etching (microfabrication) , zinc , selectivity , nanocrystalline material , microfabrication , pyroelectricity , nanotechnology , fabrication , optoelectronics , layer (electronics) , metallurgy , chemistry , mathematics , medicine , biochemistry , mathematics education , alternative medicine , pathology , dielectric , ferroelectricity , catalysis