Open AccessMeasurement Technology of Dry Etching Chlorinated Byproducts and Improvement Strategy in Thin Film Transistor Liquid Crystal Display Production
Author(s) -
Ruei-Hao Shie,
Chang-chuan Chan
Publication year - 2011
Publication title -
epidemiology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.901
H-Index - 173
eISSN - 1531-5487
pISSN - 1044-3983
DOI - 10.1097/01.ede.0000392269.25712.1e
Subject(s) - scrubber , chemistry , gas chromatography , etching (microfabrication) , flame ionization detector , waste management , analytical chemistry (journal) , environmental chemistry , organic chemistry , chromatography , layer (electronics) , engineering