Open AccessReview on the adsorption of airborne molecular contaminants in electronic industry cleanrooms
Author(s) -
Lu YuMing,
Guoqing Cao,
Xinliang Feng,
Yanpeng Wu
Publication year - 2022
Publication title -
international journal of low-carbon technologies
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.458
H-Index - 26
eISSN - 1748-1325
pISSN - 1748-1317
DOI - 10.1093/ijlct/ctac090
Subject(s) - adsorption , porous medium , cleanroom , porosity , characterization (materials science) , process engineering , chemical engineering , materials science , environmental science , nanotechnology , chemistry , engineering , organic chemistry , composite material
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