Open AccessRobust H-infinity control of two novel MEMS force sensors
Author(s) -
Stanley C. Obilikpa
Publication year - 2020
Publication title -
iop scinotes
Language(s) - English
Resource type - Journals
ISSN - 2633-1357
DOI - 10.1088/2633-1357/abb933
Subject(s) - robustness (evolution) , control theory (sociology) , microelectromechanical systems , cantilever , h infinity methods in control theory , robust control , pid controller , stiffness , mechanical system , control engineering , computer science , control system , engineering , materials science , control (management) , nanotechnology , artificial intelligence , structural engineering , temperature control , biochemistry , chemistry , electrical engineering , gene
This paper presents the design and implementation of a robust H-infinity controller on two novel MEMS force sensors. The novel microelectromechanical system (MEMS) sensors incorporated a mechanism that permits tuning of the device’s mechanical stiffness and has been used for the characterization of micro-cantilever and biological tissues. To ensure stability and guaranteed performances, certain specifications such as error tracking, command moderation, disturbance rejection, and robustness in presence of uncertainties, were made and the H-infinity control technique was employed to synthesize robust controllers for the two force sensors. Finally, this robust controller, integral, and PID controllers were implemented on the real systems and their performance in closed-loop were compared.