Open AccessEnhanced humidity responsive ultrasonically nebulised V2O5 thin films
Author(s) -
Inyalot Jude Tadeo,
Rajasekar Parasuraman,
S. B. Krupanidhi,
A.M. Umarji
Publication year - 2020
Publication title -
nano express
Language(s) - English
Resource type - Journals
ISSN - 2632-959X
DOI - 10.1088/2632-959x/ab779a
Subject(s) - thin film , materials science , nanocrystalline material , raman spectroscopy , x ray photoelectron spectroscopy , analytical chemistry (journal) , scanning electron microscope , crystallite , substrate (aquarium) , chemical engineering , nanotechnology , optics , chemistry , composite material , chromatography , geology , metallurgy , physics , oceanography , engineering
A large surface to volume ratio and easily accessible active reaction sites are key attributes for a good gas sensing material. Herein, we report synthesis, characterisation and humidity sensing properties of phase pure 420 nm thick low temperature (350 °C) polycrystalline V 2 O 5 thin films deposited on quartz substrate by ultrasonic nebulized spray pyrolysis of aqueous combustion mixture (UNSPACM). The thin films were characterized by x-ray diffraction, Raman spectroscopy, atomic force microscope, field emission scanning microscope, transmission electron microscope, UV–visible spectroscopy and XPS. The highly porous and nanocrystalline characteristic of V 2 O 5 thin films synthesized by this technique provide large surface to volume ratio and easily accessible active reaction sites making it a prominent material for gas sensing applications. The fabricated humidity sensor based on V 2 O 5 thin films exhibited high sensitivity with good stability and reproducibility at room temperature. The sensor exhibited high sensitivity of 90.8% at 76% RH with response time of 35–60 s and recovery time of 7–54 s. We believe this method provides means for large-scale synthesis of V 2 O 5 thin films for several gas sensing applications.