Open AccessPolymeric sidewall transfer lithography
Author(s) -
Yi-Chen Lo,
Xing Cheng
Publication year - 2022
Publication title -
journal of physics communications
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.407
H-Index - 17
ISSN - 2399-6528
DOI - 10.1088/2399-6528/ac8f18
Subject(s) - trench , materials science , nanoimprint lithography , substrate (aquarium) , lithography , spin coating , polymer , nanotechnology , coating , layer (electronics) , nano , photolithography , optoelectronics , composite material , fabrication , medicine , oceanography , alternative medicine , pathology , geology
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