Bistability study of buckled MEMS diaphragms

Bistable elements are candidate structures for the evolving field of MEMS-based no-power event-driven sensors. In this paper, we present a strategy for producing bistable elements and investigate two compatible bilayer material systems for their realization using MEMS technology. Both bilayer systems leverage thermally-grown silicon dioxide as the principal stress-producing layer and a second material (either polyimide or aluminum) as the main structural layer. Arrays of buckled circular diaphragms, ranging in diameter from 100 μ m to 700 μ m in 50 μ m increments, were fabricated and their performances were compared to modeled and FEA-simulated results. In all cases, the diaphragms buckled when DRIE-released as expected, and their buckled experimental heights were within 9.1% of the theory and 1.8% of the FEA prediction. Interestingly, the smaller diameter structures exhibited a directional bias which we investigate and forecast using FEA. These bistable mechanical elements have the ability to serve as building blocks for no-power threshold-driven smart switches. New contributions to the field include: (a) introduction of a new bistable material system made from aluminum and compressive oxide, (b) investigation of diaphragm diameter size as it related to the phenomena of bistability versus non-bistability, (c) FEA analysis of the critical transition between bistability and non-bistability, and (d) introduction of the ‘dome factor’ term to describe dome quality.