Open AccessDevelopment of nanometer-thick graphite film extreme ultraviolet pellicle with hydrogen-resistant TiN capping layer
Author(s) -
Jin-Ho Yeo,
KiBong Nam,
Gil–Seon Kang,
Qicheng Hu,
Chang-Young Jeong,
Young-Soo Park,
Seok Jong Lee,
Jong Hwan Jung,
Seung Hyun Lee,
Deok Hyun Cho,
Mun Ja Kim,
Jinsu Yoo
Publication year - 2022
Publication title -
materials research express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.383
H-Index - 35
ISSN - 2053-1591
DOI - 10.1088/2053-1591/ac7850
Subject(s) - tin , materials science , raman spectroscopy , x ray photoelectron spectroscopy , transmission electron microscopy , layer (electronics) , graphite , atomic layer deposition , hydrogen , chemical vapor deposition , chemical engineering , nanotechnology , composite material , metallurgy , chemistry , optics , physics , organic chemistry , engineering