High selectivity Fe3O4 nanoparticle to volatile organic compound (VOC) for MEMS gas sensors | Zendy

YuJen Hsiao | Zendy; Yempati Nagarjuna | Zendy; ChunAn Tsai | Zendy; ShengChang Wang | Zendy

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High selectivity Fe₃O₄ nanoparticle to volatile organic compound (VOC) for MEMS gas sensors

Author(s) -

YuJen Hsiao,

Yempati Nagarjuna,

ChunAn Tsai,

ShengChang Wang

Publication year - 2020

Publication title -

materials research express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.383

H-Index - 35

ISSN - 2053-1591

DOI - 10.1088/2053-1591/ab9bc7

Subject(s) - volatile organic compound , selectivity , spinel , crystallite , analytical chemistry (journal) , microelectromechanical systems , chemistry , nanoparticle , materials science , gas chromatography , inorganic chemistry , chemical engineering , nanotechnology , environmental chemistry , organic chemistry , chromatography , metallurgy , catalysis , engineering

In the current study, XRD analysis shows the polycrystalline form an inverse spinel Fe 3 O 4 structure. Fe 3 O 4 film is prepared by dip coating method on MEMS gas sensors to test the sensitivity on volatile organic compound (VOC) gas. VOC is being tested at 92 mW (∼300 °C) power consumption with different VOC gas concentrations and also tested with different gases like NO 2 , SO 2 , NH 3 and CO gas. The results showed that the Fe 3 O 4 gas sensor has better selectivity and high response with VOC 1.2 ppm concentration. Structural morphology is seen and reaction mechanism when VOC gas reacts with Fe 3 O 4 material is also being discussed.

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