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In the current study, XRD analysis shows the polycrystalline form an inverse spinel Fe 3 O 4  structure. Fe 3 O 4  film is prepared by dip coating method on MEMS gas sensors to test the sensitivity on volatile organic compound (VOC) gas. VOC is being tested at 92 mW (∼300 °C) power consumption with different VOC gas concentrations and also tested with different gases like NO 2 , SO 2 , NH 3  and CO gas. The results showed that the Fe 3 O 4  gas sensor has better selectivity and high response with VOC 1.2 ppm concentration. Structural morphology is seen and reaction mechanism when VOC gas reacts with Fe 3 O 4  material is also being discussed.

High selectivity Fe3O4 nanoparticle to volatile organic compound (VOC) for MEMS gas sensors

High selectivity Fe₃O₄ nanoparticle to volatile organic compound (VOC) for MEMS gas sensors