Open AccessNew deposition method of MgB2 thin film with thermal evaporation of Mg and sputtering of B
Author(s) -
Takumu Iwanaka,
Toshiaki Kusunoki,
Hiroshi Kotaki,
Masami Kodama,
Hideki Tanaka,
Akiyoshi Matsumoto,
Shigeru Horii,
Toshiya Doi
Publication year - 2020
Publication title -
materials research express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.383
H-Index - 35
ISSN - 2053-1591
DOI - 10.1088/2053-1591/ab945a
Subject(s) - sputtering , materials science , deposition (geology) , evaporation , amorphous solid , thin film , annealing (glass) , sputter deposition , analytical chemistry (journal) , electron beam physical vapor deposition , substrate (aquarium) , nanotechnology , composite material , chemistry , crystallography , paleontology , physics , sediment , geology , thermodynamics , oceanography , chromatography , biology