Open AccessPhysical properties of indium zinc oxide and aluminium zinc oxide thin films deposited by radio-frequency magnetron sputtering
Author(s) -
Nicolae-Tiberius Vasile,
Sorina Iftimie,
T. Acsente,
Claudiu Locovei,
Alina Irina Călugăr,
A. Radu,
L. Ion,
VladAndrei Antohe,
Dumitru Manica,
Ovidiu Toma,
Gheorghe Dinescu,
S. Antohe
Publication year - 2020
Publication title -
materials research express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.383
H-Index - 35
ISSN - 2053-1591
DOI - 10.1088/2053-1591/ab688d
Subject(s) - materials science , thin film , zinc , sputter deposition , wurtzite crystal structure , amorphous solid , indium , sputtering , substrate (aquarium) , oxide , analytical chemistry (journal) , optoelectronics , metallurgy , nanotechnology , chemistry , crystallography , oceanography , chromatography , geology