Physical properties of indium zinc oxide and aluminium zinc oxide thin films deposited by radio-frequency magnetron sputtering | Zendy

Nicoleta Vasile | Zendy; Sorina Iftimie | Zendy; T. Acsente | Zendy; Claudiu Locovei | Zendy; Alina Irina Călugăr | Zendy; A. Radu | Zendy; L. Ion | Zendy; VladAndrei Antohe | Zendy; Dumitru Manica | Zendy; Ovidiu Toma | Zendy; G. Dinescu | Zendy; S. Antohe | Zendy

Open Access

Physical properties of indium zinc oxide and aluminium zinc oxide thin films deposited by radio-frequency magnetron sputtering

Author(s) -

Nicoleta Vasile,

Sorina Iftimie,

T. Acsente,

Claudiu Locovei,

Alina Irina Călugăr,

A. Radu,

L. Ion,

VladAndrei Antohe,

Dumitru Manica,

Ovidiu Toma,

G. Dinescu,

S. Antohe

Publication year - 2020

Publication title -

materials research express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.383

H-Index - 35

ISSN - 2053-1591

DOI - 10.1088/2053-1591/ab688d

Subject(s) - materials science , thin film , sputter deposition , wurtzite crystal structure , zinc , amorphous solid , sputtering , indium , substrate (aquarium) , scanning electron microscope , analytical chemistry (journal) , optoelectronics , composite material , metallurgy , nanotechnology , crystallography , chemistry , oceanography , chromatography , geology

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