Open AccessEffects of oxygen flow on properties of La2Ti2O7−x films
Author(s) -
Jianchao Li,
Junhong Su,
Chen Yang,
Changlong Cai,
Zhili Chen
Publication year - 2019
Publication title -
materials research express
Language(s) - English
Resource type - Journals
ISSN - 2053-1591
DOI - 10.1088/2053-1591/ab5aba
Subject(s) - oxygen , analytical chemistry (journal) , volumetric flow rate , materials science , x ray photoelectron spectroscopy , limiting oxygen concentration , molar absorptivity , thin film , refractive index , chemistry , optics , nanotechnology , chemical engineering , chromatography , optoelectronics , thermodynamics , engineering , physics , organic chemistry
In order to obtain the relationship between the properties and the oxygen flow rate of La 2 Ti 2 O 7−x film, the films were prepared by electron beam evaporation with various oxygen flow rates on Si and quartz substrates. The effects of oxygen flow on the properties of La 2 Ti 2 O 7−x film were analyzed by XRD, XPS, optical constant and laser damage test. The result shows that the La 2 Ti 2 O 7−x film lose oxygen and lead to the transition of Ti 4+ to Ti 3+ in oxygen-free environment. When the oxygen flow rate is greater than 4 sccm, the content of Ti 4+ is stable. The refractive index of La 2 Ti 2 O 7−x films decreases with the increase of oxygen flow rate and stabilizes at oxygen flow rate greater than 4 sccm. The extinction coefficient of film deposited in oxygen-free environment is less than 10 −4 . As the oxygen flow rate increases, the film absorption is further improved to reach 10 −5 at wavelengths longer than 350 nm. The laser damage threshold of films increased with increasing oxygen flow and the maximum value is 18.35 J cm −2 .
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