Open AccessNondestructive surface profiling of hidden MEMS using an infrared low-coherence interferometric microscope
Author(s) -
Johann Krauter,
Wolfgang Osten
Publication year - 2017
Publication title -
surface topography metrology and properties
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.408
H-Index - 23
ISSN - 2051-672X
DOI - 10.1088/2051-672x/aaa0a8
Subject(s) - microelectromechanical systems , interferometry , opacity , profiling (computer programming) , coherence (philosophical gambling strategy) , automotive industry , wafer dicing , computer science , optics , materials science , optoelectronics , engineering , aerospace engineering , physics , quantum mechanics , operating system , wafer
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