Open AccessRobust evaluation of statistical surface topography parameters using focus-variation microscopy
Author(s) -
Erich N. Grossman,
M.N. Gould,
N P Mujica-Schwann
Publication year - 2016
Publication title -
surface topography
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.408
H-Index - 23
ISSN - 2051-672X
DOI - 10.1088/2051-672x/4/3/035003
Subject(s) - autocorrelation , autocovariance , spatial analysis , focus (optics) , deconvolution , range (aeronautics) , monte carlo method , surface roughness , surface finish , optics , statistics , mathematics , algorithm , computer science , physics , materials science , fourier transform , mathematical analysis , quantum mechanics , composite material