Open AccessAl/Ti-film-resistor based thermal heater with Zig-Zag configuration for MEMS application
Author(s) -
Xinghua Wang,
Zhijie Jiang,
Jin Qin,
Hongwei Liu,
Fan Gao,
Canbin Hu
Publication year - 2020
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/892/1/012063
Subject(s) - microelectromechanical systems , resistor , materials science , joule heating , fabrication , thin film , heating element , optoelectronics , voltage , thermal , zigzag , joule effect , electrical engineering , nanotechnology , composite material , engineering , medicine , alternative medicine , physics , geometry , mathematics , pathology , meteorology
In this paper, we proposed a micro-heater based on Al/Ti-film resistors for MEMS application. The film heater, designed with unique Zig-Zag configuration, has a high heating efficiency as generated Joule heat could be confined in Zig-Zag area. Consequently, much higher maximum temperature could be achieved under the lower applied voltage, compared with conventional strategy. Based on MEMS technique, thin film based micro-heater was fabricated, and experimental characterization was carried out in room temperature. Since the micro-heaters are all in the form of thin film-resistors, the structure design is simple and fabrication process compatibility is good, which is particularly suitable in the fields of MEMS integration and actuation application.