Open AccessMeasurements of the quantitative analytical depth resolution at evaporated aluminium- and silver-layers with the FEG-EPMA JEOL JXA-8530F
Author(s) -
Dirk Berger,
Jörg Nissen
Publication year - 2020
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/891/1/012004
Subject(s) - resolution (logic) , electron microprobe , aluminium , analytical chemistry (journal) , materials science , image resolution , energy (signal processing) , excitation , optics , chemistry , physics , metallurgy , chromatography , quantum mechanics , artificial intelligence , computer science