Open AccessProcess variation and analysis of FinFET for low-power applications
Author(s) -
Shekhar Verma,
Suman Lata Tripathi
Publication year - 2020
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/872/1/012015
Subject(s) - microelectronics , materials science , dissipation , oxide , very large scale integration , process variation , optoelectronics , nanometre , leakage (economics) , electronic engineering , electrical engineering , engineering , voltage , physics , composite material , metallurgy , economics , thermodynamics , macroeconomics