Open AccessRealisation of a biocompatible diffraction grating using an ArF excimer laser
Author(s) -
Abdulsattar A. Aesa,
C.D. Walton
Publication year - 2020
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/871/1/012058
Subject(s) - materials science , excimer laser , optics , laser ablation , diffraction , laser , ablation , diffraction grating , grating , white light interferometry , optoelectronics , interferometry , physics , aerospace engineering , engineering