Open AccessStudy of high-frequency magnetic properties of Fe-Ti-B films obtained by magnetron sputtering
Author(s) -
E. N. Sheftel,
Eugene V. Harin,
В. А. Теджетов,
Г. Ш. Усманова,
Stanislav Y. Bobrovskii,
Konstantin N. Rozanov,
Polina A. Zezyulina,
Ph. V. KiryukhantsevKorneev
Publication year - 2020
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/848/1/012082
Subject(s) - coercivity , materials science , annealing (glass) , sputter deposition , permeability (electromagnetism) , cavity magnetron , ferromagnetism , saturation (graph theory) , sputtering , magnetometer , nuclear magnetic resonance , ferromagnetic resonance , magnetization , analytical chemistry (journal) , magnetic field , condensed matter physics , metallurgy , thin film , chemistry , nanotechnology , biochemistry , physics , mathematics , chromatography , combinatorics , quantum mechanics , membrane
The Fe-Ti-B films were obtained by dc magnetron sputtering of the Fe + 15% TiB 2 and Fe + 30% TiB 2 targets. The chemical composition and structure were studied in the as-sputtered state and after vacuum annealing at 500°C. The static (saturation magnetization M s and coercive field H c ) and rf magnetic properties (magnetic permeability µ’ , frequency of natural ferromagnetic resonance f r and the frequency range in which µ’ is kept) were determined.