Open AccessStructural analysis of performance optimization of high g accelerometer chip
Author(s) -
Jiajun Chen,
Haojie Li
Publication year - 2020
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/793/1/012020
Subject(s) - accelerometer , acceleration , sensitivity (control systems) , microelectromechanical systems , natural frequency , piezoresistive effect , finite element method , chip , electronic engineering , computer science , materials science , engineering , acoustics , electrical engineering , physics , structural engineering , optoelectronics , vibration , operating system , classical mechanics
Accelerometers based on micro-electromechanical systems (MEMS) technology are widely used due to their high cost performance and easy integration. However, there are still weaknesses in the mutual limitation of sensitivity and natural frequency in ordinary MEMS acceleration-sensitive structures. In this paper, a new type of piezoresistive acceleration-sensitive structure is optimized. The specific parameters are optimized by finite element simulation. Finally, the natural frequency of the sensitive unit reaches 2.039MHz and the sensitivity reaches 0.546μV / g.