Open AccessEffect of Sputtering Conditions on Transmittance and Wear Resistance of Diamond-Like Carbon Film
Author(s) -
Lifei Lai,
Zebo Xu,
Jiawei Xu
Publication year - 2020
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/784/1/012008
Subject(s) - materials science , transmittance , sputtering , substrate (aquarium) , diamond like carbon , microstructure , sputter deposition , composite material , diamond , wear resistance , carbon film , carbon fibers , deposition (geology) , thin film , optoelectronics , nanotechnology , composite number , paleontology , oceanography , sediment , geology , biology
Diamond-like carbon (DLC) film was prepared by magnetron sputtering method on glass substrate. The microstructure, transmittance, and wear resistance of the diamond-like carbon film were investigated and analyzed. This study clearly showed the significance of sputtering power, Ar pressure and substrate temperature in controlling the transmittance and wear resistance of DLC film. The sp3 bond in the film had a greater impact on the transmittance and wear resistance of DLC film. The optimized deposition parameters obtained through experiments were: Ar pressure of 0.7 Pa, sputtering power of 100 W, and substrate temperature of 150 °C.