Open AccessEffect of Annealing Temperature on Properties of Co-Sputtered Bi2Te3
Author(s) -
Yang Liu
Publication year - 2020
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/782/2/022041
Subject(s) - annealing (glass) , materials science , thin film , thermoelectric effect , sputter deposition , seebeck coefficient , sputtering , analytical chemistry (journal) , nitrogen , metallurgy , composite material , chemistry , nanotechnology , thermodynamics , thermal conductivity , physics , organic chemistry , chromatography
Bi 2 Te 3 thin film samples are prepared by magnetron co sputtering. The samples are annealed in a nitrogen atmosphere and were treated at different temperature for 2 h. Effects of annealing temperature on the structure and thermoelectric properties of Bi 2 Te 3 are studied in detail. As the annealing temperature increases, the Te element on the surface begins to volatilize, and some Te elements precipitate and crystallize on the surface, resulting in a decrease in the Te element in the Bi 2 Te 3 thin film. When the annealing temperature is 350 ° C, the power factor of Bi 2 Te 3 film reaches a maximum of 0.21×10 −3 Wm −1 K −2 .