Open AccessStudy of confocal 3D micro X-ray fluorescence analysis technique based on polycapillary X-ray lens
Author(s) -
Zhaoying Meng,
Zhujun Xiang,
Z. G. Liu,
Hao Yi,
Kai Pan,
Peng Zhou,
Xiaoyan Lin
Publication year - 2020
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/770/1/012055
Subject(s) - microcell , confocal , materials science , scanning electron microscope , optics , x ray , lens (geology) , x ray fluorescence , fluorescence , ceramic , silicon , analytical chemistry (journal) , optoelectronics , chemistry , physics , computer science , composite material , chromatography , operating system
This study realized the microcell analysis using confocal area formed by a pair of polycapillary X-ray lens, built a 3D micro X-ray fluorescence spectrometer, elaborated the controlling software, and analyzed the 3D scan performance of the set-up via its measured and calculated basic parameters. The depth-detecting performance of the developed set-up was assessed by scanning several samples of Cu-Mo thin film on silicon base and red-green porcelain of Ming dynasty under different conditions. In addition, through surface-adaptive scanning, the scanning and identification of the fractures and fine cracks of the ceramic samples revealed the morphology of samples, which was consistent with the theoretical model.