Open AccessDesign of Piezoresistive Sensor using FEA in ANSYS
Author(s) -
Yashwardhan Sahi,
Shivam Sharma,
Swet Chandan
Publication year - 2020
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/748/1/012011
Subject(s) - piezoresistive effect , finite element method , sensitivity (control systems) , resistor , pressure sensor , materials science , microelectromechanical systems , silicon , mechanical engineering , acoustics , structural engineering , electronic engineering , electrical engineering , engineering , optoelectronics , voltage , physics
Piezoresistive pressure sensors are widely used in various fields such as in industries, automobiles, medical applications and many others. To get proper input from the sensors we must have a good sensor having good sensitivity in every type of environmental conditions. The behavior of the sensor also depends upon its thickness, area, material properties etc. This paper is based on the piezoresistive micro pressure sensor having greater sensitivity made of silicon material. Using finite element analysis (FEA) and ANSYS the sensitivity is determined on different dimensions with different loading conditions. The piezo resistors of silicon material are arranged in different patterns and the sensitivity of each plate is determined by having all the results best design for the sensor is achieved.