Open AccessRadial non-uniform piezoelectric response of perovskite islands in thin PZT films
Author(s) -
С. В. Сенкевич,
Д. А. Киселев,
T. S. Ilina,
V. V. Osipov,
Andrew Elshin,
В. П. Пронин
Publication year - 2019
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/699/1/012041
Subject(s) - materials science , piezoelectricity , silicon , substrate (aquarium) , polarization (electrochemistry) , composite material , thin film , perovskite (structure) , optoelectronics , nanotechnology , crystallography , chemistry , oceanography , geology
A comparative study of the morphology and piezoelectric response of island and continuous perovskite thin PZT films deposited on a platinized silicon substrate Si/SiO 2 /TiO 2 /Pt was carried out. It was shown that the self-polarization value of micron-size island films was about 1.4 times higher than that of continuous films. It is assumed that the difference is due to the relaxation of tensile mechanical stresses caused by silicon substrate at the island periphery.