Open AccessMechanical Analysis of Sandwiched Maglev 2D-Positioning Stage
Author(s) -
Na Song,
Guangxu Zhou,
Miaoyong Zhu,
Shaoping Ma,
Yan Mu,
Jia Gao
Publication year - 2019
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/677/2/022030
Subject(s) - maglev , finite element method , magnetic levitation , levitation , modal analysis , compensation (psychology) , deformation (meteorology) , vibration , mechanical engineering , modal , reliability (semiconductor) , structural engineering , stage (stratigraphy) , computer science , engineering , acoustics , materials science , magnet , physics , electrical engineering , composite material , geology , paleontology , psychology , power (physics) , quantum mechanics , psychoanalysis
This paper proposes a two-dimensional magnetic positioning stage with a sandwiched coplanar structure. The novel symmetric compensation structure can realize the steady levitation of the platform, which is of vital importance to the positioning accuracy. To verify the reliability of the special structure, vibration modal, thermal deformation and mechanical deformation of the sandwiched maglev positioning stage under different working conditions are analyzed in finite element method. The simulation results show that this novel structure can meet the working requirements.