Open AccessThe Effect of Substrate Temperature on the Structure and Magnetic Properties of Cobalt Films Deposited by CVD
Author(s) -
Rustam Hairullin,
S. I. Dorovskikh
Publication year - 2014
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/66/1/012023
Subject(s) - cobalt , materials science , substrate (aquarium) , composite material , chemical engineering , nanotechnology , metallurgy , geology , oceanography , engineering