Open AccessInvestigation on an Active Thermoelectric Vacuum Sensor with Low Frequency Modulation
Author(s) -
Shu-Jung Chen,
Ruei-Ting Ding
Publication year - 2019
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/644/1/012024
Subject(s) - thermopile , thermocouple , materials science , thermoelectric effect , thermoelectric cooling , amplifier , thermoelectric materials , optoelectronics , thermal resistance , microelectromechanical systems , electrical engineering , composite material , cmos , thermal conductivity , heat transfer , optics , mechanics , engineering , thermodynamics , physics , infrared