Open AccessEffect of C content on structure and the hardness of MoAlCN films
Author(s) -
Zhigang Yuan,
Yangjie Tian,
Li Sun,
Wenbang Gong,
Xiao Wu,
Xiangyang Zhou
Publication year - 2019
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/612/2/022103
Subject(s) - materials science , microstructure , analytical chemistry (journal) , amorphous solid , grain size , sputter deposition , content (measure theory) , grain boundary , sputtering , diffraction , crystallography , metallurgy , thin film , nanotechnology , chemistry , optics , mathematical analysis , mathematics , physics , chromatography