Open AccessFinite Element Analysis of Circular Silicon Diaphragm
Author(s) -
Samridhi,
M. Krishna Kumar,
Kulwant Singh,
P. A. Alvi
Publication year - 2019
Publication title -
iop conference series. materials science and engineering
Language(s) - Uncategorized
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/594/1/012045
Subject(s) - diaphragm (acoustics) , miniaturization , finite element method , silicon , fabrication , mechanical engineering , microelectromechanical systems , engineering , automation , reliability (semiconductor) , structural engineering , computer science , electronic engineering , materials science , acoustics , electrical engineering , nanotechnology , optoelectronics , physics , medicine , power (physics) , alternative medicine , pathology , quantum mechanics , loudspeaker