Open AccessFinite Element Analysis of PGM Process for Wafer Based Lens Array
Author(s) -
Yang Hu,
Jian Zhou,
Mujun Li,
Lianguan Shen
Publication year - 2019
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/592/1/012024
Subject(s) - wafer , molding (decorative) , lens (geology) , finite element method , materials science , residual stress , process (computing) , optics , composite material , mechanical engineering , structural engineering , optoelectronics , engineering , computer science , physics , operating system
In order to study the PGM process for wafer based lens array, we established a 3D finite element model of glass wafer with lens array by using the submodel technique in ABAQUS. Then assessment criteria of the molded lens and influence of different PGM process parameters were investigated thoroughly. The obtained results show that during the molding stage, proper molding pressure can help the lens fill better and decrease the sag height deviation significantly. While during the annealing stage, holding pressure is essential for keeping the molded lens’ structure and position, but residual stress must be considered at the same time.