Open AccessDevelopment of mathematical models for calculating statics and dynamics of membrane sensitive elements of microelectromechanical control systems
Author(s) -
S. V. Bibikov,
M. E. Kalinkina,
A. S. Kozlov,
A. G. Korobeynikov,
R. I. Labkovskaia,
O. I. Pirozhnikova,
V. L. Tkalich
Publication year - 2019
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/560/1/012022
Subject(s) - statics , microelectromechanical systems , nonlinear system , finite element method , deformation (meteorology) , beam (structure) , membrane , computer science , control theory (sociology) , mechanics , structural engineering , engineering , materials science , physics , classical mechanics , control (management) , chemistry , nanotechnology , biochemistry , quantum mechanics , artificial intelligence , composite material