Open AccessStudying structural properties of thin film nanostructure of pentoxide vanadium Prepared by reactive DC magnetron sputtering
Author(s) -
Mohammed. Sh. Muhammed,
Mohammed. K. Kalaf,
Sabri J. Mohammed
Publication year - 2019
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/557/1/012065
Subject(s) - pentoxide , vanadium , materials science , crystallite , sputter deposition , texture (cosmology) , grain size , analytical chemistry (journal) , sputtering , cavity magnetron , thin film , chemical engineering , nanotechnology , metallurgy , chemistry , organic chemistry , artificial intelligence , computer science , engineering , image (mathematics)
Abstract. In this work, the structural properties of the monocrystalline vanadium pentoxide have been presented. Vanadium pentoxide (V 2 O 5 ) films were deposited by using a DC reactive magnetron sputtering system at working pressure of 8.5x10 -2 mbar. The sputtered vanadium atoms were sputtered and oxidized in presence O 2 :Ar gas mixture by (5/95,10/90,15/85,20/80,30/70,50/50). Employment of magnetron results in the formation of V 2 O 5 in the final samples according to the XRD analysis, increase the roughness and hence surface area of the produced V 2 O 5 nanostructures. The results of X-rays are shown to us, the deposited films were formed by nanoparticles with average grain size in the range of (52.11nm to 98.03) nm and roughness Ave (nm) in the range of (1.04nm to 8.88nm). The deposited films are identified to be polycrystalline nature with a cubic structure along ((001), (111)) and ((200)) orientation also MonoV2O5, Cub VO were found as deposited. The texture of the films was observed using SEM and AFM, it was observed that the grain size was increased with increased the O 2 percentage. These improvements in the structural properties of the produced vanadium pentoxide make these nanostructures good candidates for specific applications, such as photo detectors, solar cells, electro chromic smart window and gas sensor.