Open AccessRadiation nanotechnology for selective modifications of atomic composition and properties of thin film materials
Author(s) -
M. M. Dementyeva,
K. E. Prikhod’ko,
Б. А. Гурович,
L. V. Kutuzov,
B. Goncharov,
Д. А. Комаров
Publication year - 2019
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/525/1/012013
Subject(s) - irradiation , materials science , thin film , ion beam , ion , radiation , nanotechnology , optoelectronics , optics , chemistry , physics , organic chemistry , nuclear physics