Open AccessInfluences of sputtering process factors on wear resistance of TiN coated on a machine component
Author(s) -
Charnnarong Saikaew
Publication year - 2019
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/503/1/012023
Subject(s) - tin , weaving , sputtering , materials science , factorial experiment , volumetric flow rate , flow (mathematics) , metallurgy , engineering drawing , composite material , engineering , mathematics , mechanics , statistics , nanotechnology , geometry , thin film , physics