Open AccessAnalysis of humidity influence on adhesion and tribological properties of niobium nitride thin films
Author(s) -
Florina Șerdean,
Marius Pustan,
Violeta Merie,
Corina Bîrleanu,
Horea-George Crișan
Publication year - 2019
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/499/1/012006
Subject(s) - materials science , tribology , niobium nitride , thin film , niobium , adhesion , composite material , silicon nitride , sputter deposition , humidity , relative humidity , nitride , atomic force microscopy , nanoindentation , nanotechnology , sputtering , metallurgy , layer (electronics) , thermodynamics , physics