Open AccessTemperature distribution on dielectric membrane structures for sensitive elements of semiconductor gas sensors
Author(s) -
Denis Veselov,
Yu. A. Voronov
Publication year - 2019
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/498/1/012037
Subject(s) - membrane , semiconductor , dielectric , materials science , membrane structure , optoelectronics , chemistry , biochemistry